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Swedish Research Infrastructure for Micro- and Nanofabrication (Myfab)
Date of Last update : 2019.02.22 Rivision Request
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Hosting Legal Entity
Chalmers University of Technology
Type Of RI
Distributed
Location
Isafjordsgatan 24, Electrum Laboratory, KTH, Royal Institute of Technology, Kista, PO: 16440 (Sweden), Sweden(59.4046630859375, 17.9491195678711)
Coordinating Country
Sweden
Life Cycle Status
Operational since 2004
Mission and objective
Myfab offers distributed high-quality cleanroom facilities and associated expertise for advanced research and education to researchers and product developers at universities and high tech industries. Here you get access to the best equipment you can find in Sweden, to give your research and technical development the possibilities they deserve.
RI Keywords
Micro,Nano,Microfabrication,Microtechnology,Nanofabrication,Nanotechnology,Clean-room,E-beam,Lithography,Epitaxy,Ion-beam,Open-access
RI Category
Electrical and Optical Engineering Facilities;Extreme Conditions Facilities;Mechanical Engineering Facilities;Materials Synthesis or Testing Facilities;Micro- and Nanotechnology facilities
Scientific Domain
Engineering and Energy;Physics, Astronomy, Astrophysics and Mathematics;Information Science and Technology;Chemistry and Material Sciences;Biological and Medical Sciences;Earth and Environmental Sciences
Access WebPage
http://myfab.se/

Equipment

- More than 700 tools for nanotechnology and characterization

Electron beam lithography (high resolution), thin film deposition, several etching methods, ion implantation, thermal processing, MBE, MOCVD, die mounting, back-end assembly, a large number of characterization techniques (SEM, FIB, TEM, XPS, ...). Processes established for e.g. silicon technologies, III-V and photonic devices and quantum devices. See: http://myfab.se and subpages therein for all tools and their descriptions.

Service

- Open access to clean-room based nanofabrication and characterization equipment and expertize

Open access to more than 600 tools in three cleanrooms, user support, user training, education and process service.