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Center of Semiconductor Technology (PTC)
Date of Last update : 2017.03.22 Rivision Request
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Hosting Legal Entity
Vilnius University, Vilnius University
Type Of RI
Single-sited
Location
Sauletekio al. 15, Vilnius, PO: LT-10222 (Lithuania), Lithuania(54.7233505249023, 25.3379325866699)
Coordinating Country
Lithuania
Life Cycle Status
Construction since 2012
Mission and objective
The Center of Semiconductor Technology will be a follow-up of the recent joint agreement of the Lithuanian researchers working in different institutions in the field of semiconductor science and technology to establish a semiconductor technology center in the framework of the major national program for the Sauletekis Valley. This center will meet the needs of these researchers for facilities necessary to purposefully fabricate samples for their research and to develop device prototypes for specific applications. This infrastructure would be useful for high-tech companies in Lithuania and, increasingly in time, abroad for developing their products, but it is mainly directed to facilitate implementation of scientific ideas to products by creating a technological base for researchers to develop their prospective ideas into a functional device prototypes serving as a base for establishment of spin-offs to produce commercial products.
RI Keywords
Semiconductor technology,Nanotechnology,Optoelectronic devices,Organic electronics
RI Category
Micro- and Nanotechnology facilities
Scientific Domain
Chemistry and Material Sciences;Engineering and Energy;Physics, Astronomy, Astrophysics and Mathematics
Access WebPage
http://www.tmi.vu.lt/en/open-access

Equipment

- Equipment for characterization of material structure

X-ray characterization devices (XRD, XPS), microscopy devices.

- Equipment for deposition of semiconductor epilayers and heterostructures

Three Molecular Beam Epitaxy (MBE) machines. Metal-Organic Chemical Vapor Deposition (MOCVD) reactor. Liquid epitaxy equipment. Two Chemical Vapor Deposition (CVD) reactors.

- Equipment for semiconductor processing

Equipment for photolithography, metal and dielectric layer deposition, thermal annealing, dry and chemical etching, bonding, and mounting.

- Equipment for fabrication of organic semiconductor structures

Equipment for the organic semiconductor layer evaporation, casting, metallization, sealing, glove-boxes, etc.

Service

- Semiconductor processing

Access to equipment for photolithography, metal and dielectric layer deposition, thermal annealing, dry and chemical etching, bonding, and mounting. user support and training.

- Fabrication of organic semiconductor structures

Organic semiconductor layer evaporation, casting, metallization, sealing, user support and training.

- Materials characterization by X-ray and optical techniques

Study of materials structure using XRD, XPS, and optical microscopy.

- Semiconductor epitaxy

Deposition of semiconductor epilayers and heterostructures by Molecular Beam Epitaxy (MBE), Metal-Organic Chemical Vapor Deposition (MOCVD), liquid epitaxy, and Chemical Vapor Deposition (CVD).