Automatic high mass resolution high sensitivity secondary ion mass spectrometer (SIMS) with SCAPS detector designed for
in-situ measurement of elemental and isotopic compositions of micron-scale areas on the surface of solid samples in
earth sciences, nuclear chemistry, and industry.
The high mass resolution is achieved by the use of a large double-focussing mass spectrometer (energy and mass refocussing)
to prevent the complex isobaric interference for the analysis of geological samples.
Accurate analysis of the isotopic compositions of trace elements at concentrations of a few parts per million.
Quantitative ion imaging detector allowing acquisition and digitalization of ion image formed in the direct imaging mode.
- In-situ analysis for isotopic ratios
- High resolution quantitative isotopic imaging
Production Company: Cameca / Model: IMS-1300HR3
• SCAPS image system
- Stacked CMOS active pixel sensor (SCAPS)
for quantitative 2D imaging analysis
• Primary ion column
- Oxygen RF plasma ion source for
- Oxygen RF plasma ion source for O2+, O-, O2- and Cs microbeam source beam diameter < 5㎛, beam current of O2- > 9 pA/㎛2
- Cs microbeam source
- Electron gun for insulating samples
- Oxygen flooding attachment
- Multicollection system with 5 detectors and three additional Faraday cups (1012 Ω resistor)
KBSI Ochang Center 162, Yeongudanji-ro, Ochang-eup, Cheongwon-gu, Cheongju-si, Chungcheongbuk-do, Republic of Korea
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