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EUROPLANET 2024

High Precision Isotope Geochemistry/Cosmochemistry and Geochronology Laboratory Nano Secondary Ion Mass Spectrometer MERIL Logo
Facility name
Hosting Legal Entity
KBSI
Contact
Dr. Tae-Eun Hong  Send E-Mail
+82-51-974-6109
RI Category
Analytical Facilities
RI Keywords
SIMS, Nano SIMS, Isotope analysis, isotope imaging, depth profile
TRL
  1. Basic Technology
    Research
    1단계 2단계
  2. Research to Prove
    Feasibility
    3단계 4단계
  3. Technology
    Demonstration
    5단계 6단계
  4. System/Subsystem
    Development
    7단계 8단계
  5. System Test
    Launch &
    Operaions
    9단계
Description
7 Days

The unique instruments in the surface analytical fields with a nano-scale primary beam. NanoSIMS 50 can perform the quantitative imaging process with focused 50 nm primary ion beams for the distribution of trace elements in materials.
Application Area
- Element distribution analysis of cathode, anode materials
- Depth profiles of impurities in the micro patterns for semiconductors
- Element distribution analysis of grain boundary segregation in steel
- High-sensitivity imaging of light elements (including hydrogen)
Specifications
Production Company: Cameca / Model: NanoSIMS 50
- Primary Ion : Cs+, O2+, O-
- Smaller beam size to spatial resolution: 50nm
- Cs+ : 50 nm, O- : 200 nm
- Mass range: 1 to 360 amu
- High mass resolution: M/dM > 5000
- Detection limits: ppb ~ ppm levels
- Five masses parallel detection

Equipment Component

Equipment Component

Provide name and model item

Name Model
Nano SIMS Primary Column Upgrade NanoSIMS 50L
Scanning Force Microscope Nanowizard II
Surface Profilometer P-7

location

30, Gwahaksandan 1-ro 60beon-gil, Gangseo-gu, Busan, Republic of Korea

Photos

  • Nano SIMS 일차이온 컬럼 업그레이드.jpg
  • 7981120160128214104_01.jpg
  • P7표면단차측정기.jpg