search form

search form

Select Research area & RI category

Select country

  • MERIL
  • euro planet 2024

EUROPLANET 2024

High Resolution TEM Laboratory Double Cs & Monochromated TEM MERIL Logo
Facility name
Hosting Legal Entity
KBSI
Contact
Dr. Hionsuck Baik  Send E-Mail
+82-2-6943-4123
RI Category
Analytical Facilities
RI Keywords
TEM
TRL
  1. Basic Technology
    Research
    1단계 2단계
  2. Research to Prove
    Feasibility
    3단계 4단계
  3. Technology
    Demonstration
    5단계 6단계
  4. System/Subsystem
    Development
    7단계 8단계
  5. System Test
    Launch &
    Operaions
    9단계
Description
7 Days (16hr + 3FIB*) *the number of Focused Ion Beam

- Thermo Fisher Scientific(Before FEI corporation) Titan Themis G3 Cubed
- Probe Corrector
- Image Corrector
- Monochromator
- 120mm2 Detector size Super EDX Chemi-STEM Technology
- Quntum 966 EELS
- Ceta2 Camera System
Application Area
- High Spatial Resolution Spectrum Imaging for Nano Film and Nano Object[Catalysis CoreShell particle]
- Chemical Bonding Analysis for HfO2 Dielectrics
- Low Dose TEM for Organic Crystal
- Atomic Resolution STEM confocal Imaging for dislocation in GaN
- Identification of amorphous structure
Specifications
Production Company: FEI / Model: Titan Cube
• Resolution
- STEM resolution 0.063 nm
- TEM resolution 0.063 nm
• Energy Resolution
- 0.1 eV in EELS
• Electron Optics
- Accel. Volt.: 60 to 300 kV
• EDX detection Limit
- 1 atm%

location

145, Anam-ro, Seongbuk-gu, Seoul, Republic of Korea