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Super TEM and Analytical FIB. Titan and Quanta 3D
Facility name
Hosting Legal Entity
Korea Institute of Science and Technology (KIST)
Contact
jpahntem@gmail.com  Send E-Mail
RI Category
Analytical Facilities
RI Keywords
Semiconductors, atomic resolution, nano-energy electron microscope
TRL
  1. Basic Technology
    Research
    1단계 2단계
  2. Research to Prove
    Feasibility
    3단계 4단계
  3. Technology
    Demonstration
    5단계 6단계
  4. System/Subsystem
    Development
    7단계 8단계
  5. System Test
    Launch &
    Operaions
    9단계
Description
3 DAY + 1PREP

- The next generation of semiconductor-based composition, including semiconductor-related equipment and materials analysis equipment development, research-based composition, such as the construction of infrastructure - Construction of system that can be connected to a state-of-the-art equipment and industry with next-generation semiconductor company support utilizing atomic resolution level of state-of-the-art equipment - The next generation of semiconductor-based composition, including semiconductor-related equipment and materials analysis equipment development, research-based composition, such as the construction of infrastructure - Construction of system that can be connected to a state-of-the-art equipment and industry with next-generation semiconductor company support utilizing atomic resolution level of state-of-the-art equipment
Application Area
- Semiconductor commercial, energy, and materials and etc. - The next generation of semiconductor and nanotechnology devices research, advanced analytics for industrial support - Electron microscope, the structure of the semiconductor nano-area with focus ion beam equipment, components, stress, electrical properties measurement and analysis support, and etc.
Specifications

Equipment Component

Equipment Component

Provide name and model item

Name Model
Elctron Energy Loss Spectroscopy Upgrade from GIF Tridiem ERS(866) to GIF QuantumERS(966) GIF Quantum ERS 966 | Gatan
Advanced EELS analytical tools for Quantum ERS 963 GIF Quantum SE | Gatan
Chassis Assembly Chassy assy FIB EOCU | FEI
Cs Corrected TEM TITAN 80-300 FP 5701/30 | FEI

location

Seoul, Korea

Photos

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