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BIO(Bio, Inorganic ,Organic)-IT Micro Fabrication Center
Facility name
Hosting Legal Entity
Yonsei University
Contact
hyungjun@yonsei.ac.kr  Send E-Mail

hi5hj@yonsei.ac.kr  Send E-Mail
RI Category
Materials Synthesis or Testing Facilities
RI Keywords
Semiconductors, new materials and device development
TRL
  1. Basic Technology
    Research
    1단계 2단계
  2. Research to Prove
    Feasibility
    3단계 4단계
  3. Technology
    Demonstration
    5단계 6단계
  4. System/Subsystem
    Development
    7단계 8단계
  5. System Test
    Launch &
    Operaions
    9단계
Description
3 DAY + 1PREP

-Difficult to handle in a typical semiconductor processing biometric(Bio), weapons(Inorganic) and organic with a special device chip based circuit fabrication or to test the co-production processing using material of support facilities -Consultation on technologies for the devices using new materials and supporting joint research
Application Area
-Semiconductor technology based fusion and complex process, equipment, device development -Initial research and development of small and medium sized businesses and research institutes and non-semiconductor lines pilot production support -Technical advice and cooperation activities such as support small non-semiconductor line on the basis of its integrated technology, the use of new materials, process services, contract manufacturing services
Specifications

Equipment Component

Equipment Component

Provide name and model item

Name Model
Mask Aligner MA6 | Suss Microtec
Dry Furnace Melitas M15VH | 피에스티
LPCVD(Poly) SJF-1000 | 성진세미텍
Asher SEA200 | 셀비즈솔루션
Probe Station PM5 | Suss Microtec
LPCVD(NW) SJF-1000 | 성진세미텍
RIE E5 | 이디디
PLASMA DOPING SYSTEM APIS200 | 에이피티씨
MICROARRAYING SYSTEM CM-2000 | 프로테오젠(Proteogen)
4 Point Probe RS55/tc | Kla-tencor
Polymer Wet Station Wet Station | 두리텍
Sputter#3 모델명 없음 | 한국진공
Microscope Polycon | Leica
RTP SHS 200MA | Ast
Alpha Step P-17 | Kla-tencor
Sputter#1 KVS-T8860 | 한국진공
PECVD URECA 2000 | 주성엔지니어링
ALD#1 Eureka-2000 | Apl
Sputter#2 모델명 없음 | 한국진공
parylene coating system LAVIDA | 펨토사이언스(Femto Science)
AFM SYSTEM XE-100 | ㈜파크시스템스
Wet Furnace Melitas M15VH | 피에스티
spin Dryer 1600-55A | Verteq
MICROARRAY SCANNER GenePix 4100A | Molecular Devices
LPCVD (SiNx) SJF1000-T1 | 성진세미텍
Metal Etcher SEM200 | 셀비즈솔루션

location

Seoul, Korea

Photos

  • mask Aligner.jpg
  • Dry furnace.JPG
  • LPCVD SiNX poly_500.JPG
  • Asher_500.JPG
  • Probe Station_500.JPG
  • LPCVD Nanowire_500.JPG
  • RIE_500.JPG
  • 플라즈마도핑시스템.jpg
  • Micro_Arrayer.jpg
  • 4PP.jpg
  • 유기 스테이션.JPG
  • 스퍼터3.JPG
  • 현미경#1.JPG
  • 201502161139878.jpg
  • Alpha-step.JPG
  • 스퍼터1.JPG
  • PECVD.jpg
  • ALD#1.JPG
  • 스퍼터2.jpg
  • 20150911_134708.jpg
  • AFM-4.JPG
  • 크기변환_Wet Furnace.JPG
  • 20150911_134628.jpg
  • 20160906110608_20090622000000044164 NFEC-2009-06-071255.jpg
  • 20160906140607_20080806000000043963 NFEC-2008-08-063250.jpg
  • 20160906140609_20071012000000009047 NFEC-2007-10-003188.jpg