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SPTRC(Semiconductor Process Technology Research Center)
Facility name
Hosting Legal Entity
Chonbuk National University
Contact
cjchoi@jbnu.ac.kr  Send E-Mail

jyd1304@jbnu.ac.kr  Send E-Mail
RI Category
Materials Synthesis or Testing Facilities
RI Keywords
Semiconductor
TRL
  1. Basic Technology
    Research
    1단계 2단계
  2. Research to Prove
    Feasibility
    3단계 4단계
  3. Technology
    Demonstration
    5단계 6단계
  4. System/Subsystem
    Development
    7단계 8단계
  5. System Test
    Launch &
    Operaions
    9단계
Description
3 DAY + 1PREP

Semiconductor research, a part of the industry-based technology development project of the Ministry of Commerce, Industry and Energy, to secure international infrastructure for the development of nano-level devices for integrated optical and electronic devices, integrated circuit fabrication and analysis, and research by securing a process infrastructure that can be utilized by universities and industries. It was built with the support of infrastructure innovation and Jeollabuk-do.
Application Area
-Activation of industry-academic cooperation program -Professional process training for industrial companies and expansion of educational research facilities -Discharge semiconductor process manpower and compound semiconductor core manpower -Promotion of semiconductor-related industrial development in the region
Specifications

Equipment Component

Equipment Component

Provide name and model item

Name Model
Wire Bonder 4500 Series | Kulicke & Soffa
Furnace for annealing 모델명 없음 | 실트론
Rapid Thermal Processing System RTP 600 | 에이피시스템
Metal Sputter ALPS CS series | (주)알파플러스
House Gas Purifier H2 Purifier | 아론
Lingt Tools LightTools | Optical Research Associates(ORA)
Tuner Set Tuner Set | Agilent Technologies
RLC Tester 4287A | Agilent Technologies
ICP/RIE for fluorine T306-014 | 소로나
Spectrum Analyzer E8257D | Agilent Technologies
Smart EBIC System Gatan(FE-SEM Accessories) | Gatan
RF Sputtering System ATC 1300 | Aja International
Probe Station Probe Station | ㈜테스
Field Emission Scanning Electron Microscope S-4300 SE | Hitachi
Step Height Measurement Alpha-Step IQ | Kla-tencor
Wet Station Wet Station | 신영테크
Toxic Gas Monitoring System Toxic Gas Monitoring System | 아론
Optical Microscope Eclipse LV 150 | Nikon
Wafer Scriber TEC-2004TM | Tecdia
Wafer Track Smark Cube-II | 티에스티아이
MOCVD CS14416 | Aixtron
ICP/RIE for Chlorine HiEtch | Bmr Technology
BER Tester 모델명 없음 | Anritsu
E-Beam Evaporator KVE-E2000 | 코리아바큠테크㈜
Lapping/Polishing Lapping And Polishing Machine | 아론
Two chamber PECVD HiDep | Bmr Technology
RT-CVD 모델명 없음 | 예스티
Ellipsometer SE MG-1000 | (주)나노-뷰
Sawing Machine Sewing Machines | 아론
LED Measurement Set OL770 UV/VIS | Optronic Laboratories
Thermal Evaporator Thermal Evaporator | 우성하이백
Die bonder 모델명 없음 | 아이엠에스나노텍
Burn in Test 1164 | Aetrium
Low Pressure Plasma System LPPS | Plasma Finish
Hall effect measurement system 7604 | Lake Shore Cryotronics
Time Resolved Photoluminescence Time Resolved PL | Hamamatsu Photonics
Silvaco Silvaco | Silvaco
Mask Aligner MA6 | Suss Microtec
Optical Microscope INM 100 | Leica
Digital Oscilloscope DSA8200 | Tektronix
LD Tester LD Tester | 일렉스
Network/Parameter Analyzer 8753ES | Agilent Technologies
Probe Station Probe Station | Cascade Microtech
Spin Dryer Spin Rince Dryer | Verteq
Electrochemical CV Profiler PN4300PC | Accent Optical Technologies
UPS UPS | 태영전기

location

Jeonju, Jeollabuk-do, Korea

Photos

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