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  • MERIL
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Micro / Nano Fabrication Center
Facility name
Hosting Legal Entity
Korea Institute of Science and Technology(KIST)
Contact
smkwak@kist.re.kr  Send E-Mail

nkh@kist.re.kr  Send E-Mail
RI Category
Micro- and Nanotechnology facilities
RI Keywords
MEMS, nano, micro
TRL
  1. Basic Technology
    Research
    1단계 2단계
  2. Research to Prove
    Feasibility
    3단계 4단계
  3. Technology
    Demonstration
    5단계 6단계
  4. System/Subsystem
    Development
    7단계 8단계
  5. System Test
    Launch &
    Operaions
    9단계
Description
3 DAY + 1PREP

-Ensuring that characterized & advanced process technology for Micro/Nano R&D -Through stablized services of domestic and foreign industry, academia, researchers for national technology competitiveness of the relevant sector
Application Area
-IT/BT/NT/ET related to the various MEMS(Micro Electro Mechanical System) and nano technology acquisition -Development of specialized professional processes for MEMS and nano technology sector(deposition, etching precision, 20nm-class ultra-fine nano-patterning, etc.)
Specifications

Equipment Component

Equipment Component

Provide name and model item

Name Model
MASK ALIGNER MA6 | Karl Suss
Reactive Ion Etching (RIE) System VISION 320 RIE | Advanced Vacuum
SG/101-PC Electroforming System Electroforming System | Global Tech
LPCVD ( Low Stress Nitride/LTO) SJF1000T2 | EMERSOM
Plasma Enhenced Chemical Vapor Deposition PlasmaPro 800Plus | Oxford Instruments
Surface Profile Measuring System Alpha-Step IQ | Kla-tencor
PLASMA DEPOSITION & ETCHING SYSTEM DUAL 790 SERIES | Plasma Therm
Deep Trench RIE Multiplex ICP System | Surface Technology Systems(STS)
Multi Chamber Type Sputtering System SME-200E | Ulvac
LASER MICROMACHINING SYSTEM Exitech Model M2000E | Exitech
Furnace & Polysilicon Deposition SV-ICS305B | 성진세미텍
FILM THICKNESS METROLOGY SYSTEM KT-22 | Foothill Instruments
Ultra high Resolutio E-beam Lithography System Raith 150-two | Raith
ACID WET STATION HYMWSGOO | 한양기공
Wafer Bonding Sys TPS-1000A-AF-A | 비앤피사이언스
Plasma System 100 ICP-RIE Plasma Lab100 | Oxford Instruments
MRPBI 모델명없음 | (주)나노텍
Reactive ion etching PlasmaPro 800 Plus PlasmaPro 800Plus | Oxford Instruments
DRIE Scrubber Omega LPX-DSi Etch System | Spts
E-beam Evaporation System ei-5k | Ulvac
E-Beam Evaporator System ULVAC EBX1000C | Ulvac
Parylene Packing System NPCR-400A | 누리셀
Inductive Coupled Plasma Etcher plasma etcher | Surface Technology Systems(STS)
Mask Aligner MA6 | Suss Microtec
Vega SEM TS5136MM/EDS | TESCAN, sro
Spin Rinser Dryer VTI 4701S | Ptl International
Microwave Plasma Asher Mini-Plasma Station | 플라즈마트(Plasmart)
SG/101ePC Electroforming Machine SG/101e-PC | Digital Matrix
EVG Aligner EVG 6200, MA8Gen4 Pro | EV Group(EVG)

location

Seoul, Korea

Photos

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